UV Irradiator for Dicing Process NEL SYSTEM® Series

This taping system automates the removal of the protection fixing tape during dicing.

UA3000Ⅱ

UV Irradiator for wafers up to 12"

• User friendly touch panel
• UV irradiation sensor integrated
• Automatic irradiation time setting function to obtain a fixed amount of light (optional)
• Uses ozoneless UV lamp
• Single cassette compatible
• Complies to safety regulation SEMI S2/S8

UA8400

UV Irradiator for wafers up to 8"

• User friendly touch panel
• UV irradiation sensor integrated
• Automatic irradiation time setting function to obtain a fixed amount of light (optional)
• Uses ozoneless UV lamp
• Single cassette compatible

UM810/UM110

Semi-automatic UV Irradiator for wafers up to 8"

• Setting of wafer mount frame is done manually
• Automatic irradiation time setting function
• UV irradiation sensor(optional)