Degassing Module NITOSEP

Improve the yield by removing invisible gas dissolved into liquids.

Outline

In some industry where advanced levels of precision are rired, invisible gas dissolved into liquids often causes weak or inefficient yield. The degassing module “NITOSEP” can effectively remove gas that has already dissolved into liquids through its permeable membrane, and contributes to high performances and high yield in various production lines in the wide-ranging field of industry.

Features

• Superior chemical resistance enables degassing of highly corrosive chemicals.
• Low-pollution due to its non-porous membrane with excellent liquid barrier ability.
• Highly reliable with a number of fluoroplastic hollow fiber films bundled together through heat-sealing.

Applications

• Semiconductor manufacturing process (degassing of developing/rinsing solutions in the photolithographic process).
• Precision coating process (degassing of sensitizing solution/inks).
• Analytical measurement (degassing of sample solution for particle counter in liquid).